JPH0322906Y2 - - Google Patents
Info
- Publication number
- JPH0322906Y2 JPH0322906Y2 JP7418581U JP7418581U JPH0322906Y2 JP H0322906 Y2 JPH0322906 Y2 JP H0322906Y2 JP 7418581 U JP7418581 U JP 7418581U JP 7418581 U JP7418581 U JP 7418581U JP H0322906 Y2 JPH0322906 Y2 JP H0322906Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample piece
- opening
- storage base
- clamp plate
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 claims description 28
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7418581U JPH0322906Y2 (en]) | 1981-05-22 | 1981-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7418581U JPH0322906Y2 (en]) | 1981-05-22 | 1981-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57186029U JPS57186029U (en]) | 1982-11-26 |
| JPH0322906Y2 true JPH0322906Y2 (en]) | 1991-05-20 |
Family
ID=29869962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7418581U Expired JPH0322906Y2 (en]) | 1981-05-22 | 1981-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322906Y2 (en]) |
-
1981
- 1981-05-22 JP JP7418581U patent/JPH0322906Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57186029U (en]) | 1982-11-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH09218502A (ja) | レチクルボックスおよびコンテナ | |
| JP2670517B2 (ja) | Ｉｃキャリア搭載形ソケットにおける接触機構 | |
| JPH0322906Y2 (en]) | ||
| US5975836A (en) | Apparatus for visually reading semiconductor wafer identification indicia | |
| US5923040A (en) | Wafer sample retainer for an electron microscope | |
| JPS6325734Y2 (en]) | ||
| JP2005064329A (ja) | 被照射物保持機構 | |
| JP2526199Y2 (ja) | ウェハホルダの固定構造 | |
| JPS5796527A (en) | Device for adjusting specimen position for electron beam exposure apparatus | |
| JPH0722035Y2 (ja) | 試料固定装置 | |
| JPH0355935Y2 (en]) | ||
| JP2777334B2 (ja) | スクリーン印刷用の紗張り枠 | |
| JPH05291389A (ja) | 平面状基板の収納装置に用いる基板ガイド治具 | |
| JPS6322673Y2 (en]) | ||
| JPH0617299Y2 (ja) | 半導体製造装置用ステージへの被処理材固定装置 | |
| JPS61151333U (en]) | ||
| JPS6119568Y2 (en]) | ||
| JPH0541583Y2 (en]) | ||
| JP2000269314A (ja) | ウエハカセット | |
| JPH0440285Y2 (en]) | ||
| JPS5928025Y2 (ja) | 皮革張り装置 | |
| JPH037881Y2 (en]) | ||
| JPH0475588B2 (en]) | ||
| JPS6338246U (en]) | ||
| JPH0592950U (ja) | 電子顕微鏡の試料装置 |